Focus and Calibration of Spectrometers For High-Resolution Surface Ins

There are many systems that are used for material inspection, one of them is the Combined High Resolution Imaging and Spectroscopy System (CHRISS), which will be the field of study in this book. CHRISS is an imaging system with a high resolution gray scale camera, two spectrometers, three axis x,y,z positioning system, and an illumination system. This book will contain a detailed description of CHRISS system including the hardware components and software. The main focus of this book is the development of a control software to regulate the hardware components of the system with each other, including the implementation of an algorithm for the automatic focusing of spectrometers and the calibration of the spectrometers with respect to the camera. As a main goal, the proposed algorithm will be used to inspect the material surface with a high resolution hyperspectral images from spectral point measurements, focused and calibrated relatively to the camera. Furthermore, a suitable data storage format for hyperspectral images is developed. Finally, the calibration process is evaluated and the resulting hyperspectral images of multiple samples are presented.