Silver Sticking Coefficient Dependence on Silicon Surface Topography

Silicon based Solar Cells and Bio-Sensors are enhanced using Silver nanoparticles on roughened silicon surfaces. However, questions exist as to the possible influences of topography on the sticking coefficient during the film growth. This work features the main contents of a Research at the Ion Beam Center of Helmholtz Zentrum Dresden Rossendorf (HZDR) & Technische Universität Dresden, Germany, for a Degree in Nanoelectronic Systems. It entails the application of real time in-situ Rutherford Backscattering Spectrometry as a non-destructive evaluation technique to determine the influence of Silicon Sample Topographies on the sticking coefficient of Silver Nanoparticles. Oblique Angle Deposition as a mode of Electron Beam PVD is instrumental in this evaluation.